发明名称 Structure for an optical switch on a glass substrate
摘要 Optical cross-connect systems involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes and is suspended by a plurality of suspension arms attached to a glass substrate.
申请公布号 US6411427(B1) 申请公布日期 2002.06.25
申请号 US20000675945 申请日期 2000.09.28
申请人 XEROX CORPORATION 发明人 PEETERS ERIC;ROSA MICHEL A.;FORK DAVID K.
分类号 G02B26/08;B81B3/00;G02B6/35;(IPC1-7):G02B26/08;G02F1/29 主分类号 G02B26/08
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