SEMICONDUCTOR REPAIRING APPARATUS INCLUDING UNIT FOR REMOVING PARTICLES GENERATED IN FUSE BLOW PROCESS

摘要

PURPOSE: A semiconductor repairing apparatus including a unit for removing particles generated in a fuse blow process is provided to prevent a repair defect caused by the particles and to basically decrease defects of a semiconductor device, by effectively eliminating the particles. CONSTITUTION: The semiconductor device including a plurality of fuses is repaired in a wafer level. A laser beam generator(22) generates a laser beam and selectively blows the plurality of fuses. A particle eliminating unit(32) eliminates the particles generated in a process for blowing the fuse. A control unit(34) controls the laser beam generator and the particle eliminating unit.