| 摘要 |
PROBLEM TO BE SOLVED: To quickly and accurately measure a minute amount of gas desorbed from a sample. SOLUTION: The temperature-programmed desorption analyzer is provided with a sample chamber 1 for arranging a sample S, an infrared heating furnace 4 (heating means) heating the sample S arranged in the sample chamber 1, a mass spectrometer 5 (measurement means) measuring the gas desorbed from the sample by heating by means of a predetermined measurement part 2, a turbo-molecular pump 6 evacuating the measurement part 2, and a controller 13 (controlling means) variably controlling the discharge speed of the turbo molecular pump 6 optionally. By means of the controller 13, the turbo-molecular pump 6 is operated at a high speed for evacuating the measurement part 2 at least before the measurement operated by the mass spectrometer 5 is started, and the turbo-molecular pump 6 is operated at a discharge speed lower than that in the high speed operation before the measurement operation while measurement is operated by the mass spectrometer 5.
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