发明名称 Method for electrically testing a wafer interposer
摘要 The present invention comprises various embodiments of an apparatus and method for electrically testing an integrated circuit wafer interposer assembly. In certain embodiments, the wafer interposer assembly is fixed into a positioning device and moved over a test head to precisely align the contact pads for one device with the contacts of the test head. In certain embodiments, the positioning device facilitates temperature controlled testing of the wafer. In certain embodiments, multiple devices can be tested simultaneously in parallel.
申请公布号 US2002075023(A1) 申请公布日期 2002.06.20
申请号 US20000737923 申请日期 2000.12.15
申请人 MICRO-ASI, INC. 发明人 PIERCE JOHN L.
分类号 G01R1/04;(IPC1-7):G01R31/02;G01R31/26 主分类号 G01R1/04
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