| 摘要 |
PROBLEM TO BE SOLVED: To provide a FOUP opener in which each actuator of a back and forth moving structure and an elevating structure of a port door or a sensor cannot be contamination sources in a clean room and can keep high cleanliness in the clean room. SOLUTION: An actuator of a port door back and forth moving structure 40, an actuator of a sensor back and forth moving structure 60 and an actuator of the port door/sensor elevating structure 50 are arranged in the opposite position to the clean room 200 on the border of a port plate 21. |
