SCANNING PROBE MICROSCOPE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of observing, evaluating and processing a nano structure by making full use of respective features of a SEM function and a SPM function. SOLUTION: A scanning probe microscope apparatus 1 comprises a scanning electron microscope 2 having a sample base 3 on which a sample A is set and a scanning probe microscope 4 mounted on the sample base 3.