发明名称 |
Micro-electro-mechanical-system (MEMS) mirror device |
摘要 |
A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 mum above the electrodes.
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申请公布号 |
US2002071169(A1) |
申请公布日期 |
2002.06.13 |
申请号 |
US20000497270 |
申请日期 |
2000.02.01 |
申请人 |
BOWERS JOHN EDWARD;HELKEY ROGER JONATHAN;CORBALIS CHARLES;SINK ROBERT KEHL;LEE SEUNG BOK;MACDONALD NOEL |
发明人 |
BOWERS JOHN EDWARD;HELKEY ROGER JONATHAN;CORBALIS CHARLES;SINK ROBERT KEHL;LEE SEUNG BOK;MACDONALD NOEL |
分类号 |
B81B3/00;G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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