HOLDER

摘要

The invention relates to a noncontact holder using Bernoulli's theorem to hold a silicon wafer, for example. A plate face (5) includes a recess (6a) with a spout (9) such that the jet from the spout (9) makes an angle greater than 90 degrees and smaller than 180 degrees with the recess wall. The recess wall and the plate face (5) make an angel greater than 90 degrees and smaller than 180 degrees. This structure stabilizes the velocity of the fluid passing along the plate face (5) and stabilizes the negative pressure produced on the plate face, with the result that stable attraction is produced.