DEVICE AND METHOD OF CARRYING LARGE BOARD

摘要

PROBLEM TO BE SOLVED: To provide a mechanism and a method of delivering boards capable of carrying them in the standing position and the fallen position with the stabilized operation without generating the concentration of a load to a part of the board held by a board holding mechanism when standing and bringing down the board to the stabilized angle of inclination in a board delivery mechanism for a board delivery stage of a board carrying roller in a large board carrying device provided with a carriage for delivering the large boards at the board delivery stage outside a vacuum treatment chamber and the board holding mechanism for holding the board on the carriage. SOLUTION: In the large board carrying device provided with the carriage for delivering large boards at the board delivery stage outside of the vacuum treatment chamber and the board holding mechanism for holding the boards on the carriage, a folding type board delivery mechanism for standing a roller frame provided at the board delivery stage position of a board carrying roller to the stabilized angle of inclination separately from other board carrying roller parts to deliver the board to the board holding mechanism of the carriage is assembled in the carrying roller.