发明名称 Thin film capacitors
摘要 A thin film capacitor and methods for forming the same are described. The capacitor has dielectric layer with a first face, a second face, and at least one edge. The first terminal of the capacitor covers at least a portion of the first face of the dielectric layer, covers at least a portion of one edge of the dielectric layer, and covers a portion of the second face of the dielectric layer. The second terminal of the capacitor covers a portion of the second face of the dielectric layer and does not contact the first terminal. A method for forming the thin film capacitor includes hard baking photoresist at an elevated temperature and anodizing an exposed metal area using the photoresist as a mask.
申请公布号 US6404615(B1) 申请公布日期 2002.06.11
申请号 US20000505491 申请日期 2000.02.16
申请人 INTARSIA CORPORATION 发明人 WIJEYESEKERA SUNIL D.;JING JING;BENSON DONALD C.;SASAGAWA TERUO
分类号 H01L21/02;H01L27/08;(IPC1-7):H01G4/228 主分类号 H01L21/02
代理机构 代理人
主权项
地址