| 摘要 |
<p>A cooler (110), comprising a primary refrigerant circulating circuit for controlling the temperature of an electrode by circulating, in the electrode, a primary refrigerant (CW1) with a temperature controlled by a heat exchanger (138), a secondary refrigerant circulating circuit having a first heat exchanger (141) and controlling the temperature of the primary refrigerant by feeding a secondary refrigerant (CW2) to the heat exchanger, and a refrigerant circuit (140) for controlling the temperature of the secondary refrigerant by a tertiary refrigerant, wherein the temperature of the primary refrigerant is controlled by the secondary refrigerant without controlling the temperature of the primary refrigerant in the refrigerating circuit and, when the primary refrigerant is set to a temperature higher than that of the secondary refrigerant, the temperature of the primary refrigerant is controlled by the secondary refrigerant only, whereby, only when the primary refrigerant is set to a temperature lower than that of the secondary refrigerant, an energy can be saved since the temperature of the secondary refrigerant is controlled by the refrigerant circuit.</p> |
