发明名称 |
Device for placing and removing masks on/from a substrate during coating of CDs or halves of DVDs comprises a vacuum sluice having a lid and a support for the substrate |
摘要 |
Device for placing and removing masks (1a, 1b) on/from a substrate (2) during processing of a substrate comprises a vacuum sluice (3) having a lid (3a) and a support (5b) for the substrate. The lid is fitted to support the masks and can be placed on the substrate and removed from it. An Independent claim is also included for a process for placing a mask on and removing a mask from a substrate using the above device. Preferred Features: The device further comprises an elastic part (4) which adjusts the distance between the masks and the substrate when the sluice is closed. Magnets are provided in the lid and in the support to hold or expose the masks. The elastic part is formed by sealing rings.
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申请公布号 |
DE10058770(A1) |
申请公布日期 |
2002.06.06 |
申请号 |
DE20001058770 |
申请日期 |
2000.11.27 |
申请人 |
SINGULUS TECHNOLOGIES AG |
发明人 |
REISIG, MICHAEL;KEMPF, STEFAN |
分类号 |
C23C14/04;C23C14/56;(IPC1-7):C23C14/04 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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