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发明名称
TANTALUM AND TANTALUM-BASED FILMS FORMED USING FLUORINE-CONTAINING SOURCE PRECURSORS AND METHODS OF MAKING THE SAME
摘要
申请公布号
KR20020040663(A)
申请公布日期
2002.05.30
申请号
KR1020017014661
申请日期
2001.11.16
申请人
发明人
分类号
C23C16/08
主分类号
C23C16/08
代理机构
代理人
主权项
地址
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