发明名称 |
DUAL POST CENTRIFUGAL WAFER CLIP FOR SPIN RINSE DRY UNIT |
摘要 |
An apparatus and associated method for securing a wafer to a SRD spider, the SRD spider has a plurality of spider arms. The apparatus includes a plurality of spaced surfaces disposed on a distal end of one of the spider arms, each of the surfaces being spaced perpendicularly from the longitudinal axis of the spider arm. In one aspect, the two surfaces are positioned to limit production of a wedging force between that spaced surface and the wafer. In one embodiment, a post at least partially defines each one of the plurality of spaced surfaces. |
申请公布号 |
WO0205333(A3) |
申请公布日期 |
2002.05.30 |
申请号 |
WO2001US41255 |
申请日期 |
2001.07.03 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DONOSO, BERNARDO;STEVENS, JOSEPH, J.;OLGADO, DONALD, J.;KO, ALEXANDER, SOU-KANG |
分类号 |
H01L21/00;H01L21/687 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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