PLASMA APPARATUS HAVING VIEW PORT

摘要

PURPOSE: A plasma apparatus having a view port is provided to make an operator easily inspect a wafer from the outside of a process chamber when a problem occurs in the plasma apparatus having a plurality of shower heads, by installing the view port to guarantee the sight of the inside of the chamber. CONSTITUTION: The plasma apparatus(10) uses the process chamber(20) in which the plurality of shower heads are installed. The first view port(60) is installed in one side of the process chamber. The second view port(70) is installed in the other side of the process chamber so that the second view port is opposite to the first view port.