发明名称 WORKPIECE CONTAINER AND CONTAINER TRANSFER SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To increase the working efficiency in such a process that a workpiece and a treatment liquid are put into a Petri dish-like container for workpiece, and under this condition, the container is set in a pressurization container to be subjected to a supercritical drying process. SOLUTION: The workpiece container 1 is provided, on the bottom part 3, with an elevation shaft 5 which moves up and down. When the container 1 is placed on a table, the elevation shaft 5 goes up and thereby the workpiece W in the treatment liquid L is automatically lifted. Thereby, the workpiece W can be taken out easily, increasing the working efficiency.</p>
申请公布号 JP2002141406(A) 申请公布日期 2002.05.17
申请号 JP20000335059 申请日期 2000.11.01
申请人 KOBE STEEL LTD 发明人 UEHARA KAZUHIRO;KANDA TAKESHI
分类号 H01L21/673;H01L21/304;H01L21/31;H01L21/68;H01P1/00;(IPC1-7):H01L21/68 主分类号 H01L21/673
代理机构 代理人
主权项
地址