| 摘要 |
PURPOSE: To provide a processor, having a plurality of processing units capable of reducing foot print without accompanying problems in a constitution, without reducing the throughput. CONSTITUTION: The processor 100 for executing a series of processes, including a liquid process with respect to a material G to be processed comprises liquid processing units 21 and 23 for executing a prescribed liquid process, while substantially horizontally conveying a material to be processed in the processor 100, first conveyors 14 and 15 horizontally moving to convey and deliver the material G to the plurality of the units, including the units 21 and 23, thermally processing unit blocks 27, 28 and 29 constituted by laminating the plurality of thermally processing units for thermally processing, in association with the liquid process of the material G in a vertical direction, and second conveyors 61, 62 and 63 vertically movably provided to convey and deliver the material G only to the thermally processing units for constituting the blocks.
|
