GAS SUPPLY DEVICE IN SEMICONDUCTOR FABRICATING PROCESS AND GAS SUPPLY METHOD USING THE SAME

摘要

PURPOSE: A gas supply device in a semiconductor fabricating process and a gas supply method using the same are provided to prevent processing errors due to an insufficient supply of gas by checking correctly the supply amount of gas. CONSTITUTION: A sensor portion(50) is installed in a bombe(10) to check the amount of remaining gas in the bombe(10). The pressure of the gas supplied from the bombe(10) is lowered by a regulator valve(20) and a mass flow controller(30). The mass flow controller(30) is used for supplying the gas to each main equipment. A control portion(60) is used for calculating the necessary gas amount of each step by measuring a pressure and a speed of the supplied gas. The control portion(60) is used for deciding a state of a fabricating process by comparing the necessary gas amount of each step with the remaining amount of gas checked by the sensor portion(50).