| 摘要 |
A thin film magnetic head having a particularly short throat height and a fine pole portion with no magnetic saturation and a small magnetic flux leakage is manufactured on a mass scale in an efficient and speedy manner as follows. After forming a lower shield for a magnetoresistive type thin film magnetic head on a substrate, a magnetoresistive layer embedded in a shield gap layer is formed, a first magnetic layer constituting an upper shield for the magnetoresistive type thin film magnetic head as well as a lower pole of an inductive type thin film magnetic head is formed, a recess is formed in its surface, an insulating layer is embedded in the recess, and a surface is flattened. On the thus flattened surface, is formed a write gap layer, and a second magnetic layer constituting a pole chip is formed into a desired pattern. A rear edge of said second magnetic layer is extended inwardly beyond an edge of the recess opposing to an air bearing surface. On the write gap layer, first and second layer thin film coils are formed on the write gap layer such that the thin film coils are supported by photoresist insulating layers, a third magnetic layer is formed such that a front end of the third magnetic layer is retarded from the air bearing surface and the third magnetic layer is coupled with the first magnetic layer at a portion remote from the air bearing surface, and then an overcoat layer is formed on a whole surface. A position of said edge of the recess formed in the first magnetic layer opposed to the air bearing surface is not deviated during the manufacturing process and the air bearing surface is polished while said position is used as a throat height zero reference position.
|
