| 摘要 |
PROBLEM TO BE SOLVED: To provide a feeding device of a moving stage with very small feed irregularities. SOLUTION: The feeding device comprises the moving stage, a bearing for supporting the load between a movable section including the moving stage and a fixed section, a drive section for moving the moving section, a connection section for connecting a section including the moving stage and the bearing and the drive section, and a piping that makes contact with at least either the connection section or the drive section or supplies fluid which is contained at least in either of them. |
