| 摘要 |
PROBLEM TO BE SOLVED: To stably obtain desired flow rate distribution. SOLUTION: This device is equipped with a flowmeter F1 which measures a main flow rate, multiple valves V2 which control the flow rate ratios of the flow rates of fluid flowing in respective branch pipes 2 to the main flow rate of the branch flow rates, a valve opening extent meter B2 which measures the opening extents of the respective valves V2, multiple flowmeters F2 which measures the respective branch flow rates, a flow rate target ratio arithmetic part 5 which computes a flow rate target ratio SVk as the rate of the target flow rate of each branch pipe 2 to target flow rates Qk predetermined for the respective branch pipes by the branch pipes 2, a flow rate measured value ratio arithmetic part 6 which computes a branch flow rate ratio as the ratio of each branch flow rate to the total flow rate by the branch pipes 2, a valve control arithmetic part 7 which computes the manipulated variable MVk of each valve V2 according to the flow rate target ratios and branch flow rate ratios found by the branch pipes 2, and a valve selection part 8 which selects a valve V2 to be operated with the manipulated variable and opening extent according to the manipulated variables and opening extents of the respective valves V2.
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