| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric film actuator which has a large area and a high reliability, can have a large displacement by a low driving voltage, has a quick response and a large generating power and can be highly integrated, to provide a liquid injection head, and also to provide a method of manufacturing of these. SOLUTION: A piezoelectric film 1 is formed on an intermediate transfer material 2 via a porous layer 3 (when using mechanical separation or waterjet method). The surfaces of the piezoelectric film 1 and a diaphragm 5 of a diaphragm structure 4 are bonded via a metal layer and alloy layer 7 and 8 by electroheating, electro-pressure welding, low temperature heating or the like. Thereafter, the porous layer 3 interposed between the piezoelectric film 1 and the intermediate transfer material 2 is allowed to jet out the waterjet or irradiate laser light from the intermediate transfer material 2 side, separating the intermediate transfer material 2 from the piezoelectric film 1. By conducting the process of forming the piezoelectric film 1 and the process of bonding the piezoelectric film 1 to the diaphragm structure 4 separately, a piezoelectric film actuator such that the piezoelectric film 1 and the diaphragm structure 4 are firmly bonded can be obtained.</p> |
