| 摘要 |
Method and system for quality control on a production line. Troubles with quality are prevented by detecting a trend in quality characteristics of the production line or fluctuations in an early stage. The absolute values of the differences between same kinds of the data obtained at given measurement points regarding of the quality control data or the absolute values of the differences between same items of one kind of SPC data are used as a controlled item for detecting a trend in quality control characteristics or fluctuations of the quality control characteristics. The difference between maximum and minimum values of the quality control data at plural measurement points within the same lot or within the same wafer is used as the differences between same kinds of the quality control data, for example. The difference between the average values of measured values taken from two lots processed in succession by the same fabrication step or by the same fabrication apparatus for quality control is used as the difference between items of the SPC data, for example. The absolute values of these differences are managed, based on preset threshold values. If any one of the absolute values of differences exceeds the threshold value, an alarm is issued, and a notice is given to the associated plant section.
|
