发明名称 MEASURING APPARATUS FOR INTERFERENCE OF PHASE SHIFT, METHOD THEREFOR AND RECORD MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a measuring apparatus for interference of phase shift, a method therefor and a record medium capable of allowing a precise unwrap of phase wrap whose absolute value of the difference between a real phase value of a detected pixel and a phase value of other detected pixel next to the detected pixel isπor more and also capable of allowing a prevention of occurrences of unwrap errors. SOLUTION: In the method, a mean value of a corrected phase valueϕ1 by phase unwrap processing of a next detected pixel B (x, y-1) in the y direction on two-dimensional arrangement of the detected pixels equipped by an area sensor and a corrected phase valueϕ2 by phase unwrap processing of a next detected pixel C (x-1, y) in the x direction is determined as a predictive phase valueϕ4 of the detected pixel A (x, y), according to the parameter of an absolute value of the difference between the phase valueϕ4 and a phase valueϕ3 of the detected pixel A (x, y) which is calculated by a phase shift method, two-dimensional phase unwrap processing is performed to unwrap the phase valueϕ3 to a corrected phase valueϕ5 of the detected pixel A (x, y).
申请公布号 JP2002131027(A) 申请公布日期 2002.05.09
申请号 JP20000323058 申请日期 2000.10.23
申请人 MITSUTOYO CORP 发明人 MITSUYA NAOKI;KAWASAKI KAZUHIKO;UEJIMA YASUSHI
分类号 G01B9/02;G01B11/24;G06T1/00;(IPC1-7):G01B11/24 主分类号 G01B9/02
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