| 摘要 |
<p>A master-disc-manufacturing apparatus includes an electron-beam emitting portion (41) for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion (28) for evacuating a chamber (11) to produce a vacuum atmosphere therein.</p> |
