Method to reduce floating grain defects in dual-sided container capacitor fabrication

摘要

A method for fabricating dual-sided container capacitors to prevent floating grain defects. A conductive container form is fabricated on a substrate. The container is then filled with photoresist. Chemical mechanical planarization is then performed. Surrounding insulative material is removed after removal of the photoresist within the container. By first removing the fill material, any remaining floating grains settle on the surface of the insulating material. Subsequent etchback of the insulating material removes the residual grains.