| 摘要 |
PURPOSE: A dual needle valve for regulating air supplied to a cylinder used for semiconductor manufacture is provided to allow an exact speed control and a smooth motion of the cylinder. CONSTITUTION: The dual needle valve(12) is equipped for the cylinder of a semiconductor manufacturing machine such as a load arm, a part of a transferring machine. The dual needle valve(12) is composed of two air control valves(18, 20) connected respectively to two screws(14, 16). The first air control valve(18) regulates a flow rate of air supplied from a solenoid, depending upon tightening or loosening action of the first screw(14). Similarly, the second air control valve(20) regulates a flow rate of air regulated once by the first valve(18), depending upon tightening or loosening action of the first screw(16). By regulating a flow rate of air in twice, the motion of the cylinder can be stably and smoothly controlled.
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