METHOD FOR FABRICATING FED DEVICE

摘要

PURPOSE: A method for fabricating an FED(Field Emission Display) device is provided to form a fine CNT(Carbon Nano Tube) emitter by using a CMP(Chemical Mechanical Polishing) method. CONSTITUTION: A cathode electrode(32) is formed on a rear substrate(30). A screen layer is formed on an overall surface of the above structure. An emitter hole is formed by removing partially the screen layer. A CNT(44) is applied on the overall surface of the above structure by using a screen print method. The emitter hole is buried by the CNT(44). The CNT(44) is etched by using the screen layer pattern as an etch stop layer. The screen layer pattern is removed. An emitter is formed by using the CNT(44). An anode electrode(52) and a fluorescent material(54) are formed on a front substrate(50). An FED is completed by bonding the front substrate(50) and the rear substrate(30).