| 摘要 |
The invention concerns an electronic cyclotron resonance plasma deposit of single-wall carbon nanotubes, on a catalyst-free substrate, by microwave power injection into a deposit chamber comprising a magnetic confinement structure with magnetic mirror, and at least an electronic cyclotron resonance zone right inside or bordering said deposit chamber and facing said substrate, whereby, under pressure less than 10<-3> mbar, a carbon-containing gas in the magnetic mirror at the centre of the deposit chamber is dissociated and/or ionised, producing species which are deposited on said substrate which is heated; method wherein the substrate has protrusions and/or recesses. The invention also concerns the resulting single-wall nanotubes (SWNT). |
