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发明名称
CAPACITIVE PRESSURE TRANSDUCER WITH IMPROVED ELECTRODE SUPPORT
摘要
申请公布号
EP1200810(A1)
申请公布日期
2002.05.02
申请号
EP20000947349
申请日期
2000.07.14
申请人
MKS INSTRUMENTS, INC.
发明人
LISCHER, D., JEFFREY;BLANKENSHIP, STEVEN, D.
分类号
G01L13/06;G01L9/00;(IPC1-7):G01L9/12;G01L19/04
主分类号
G01L13/06
代理机构
代理人
主权项
地址
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