发明名称 Die and production method thereof, glass substrate and production method thereof and method of forming pattern on the glass substrate
摘要 On the pressing surface of a die, a first protrusion having a substantially triangular cross section and a second protrusion having a length which is greater than a width thereof and a substantially trapezoidal cross section in planes extending through both length and width dimensions thereof are provided. By press forming, a groove with a substantially V-shaped cross section to mount an optical part, and a groove with a substantially inverse-trapezoidal cross section providing an alignment marking are formed, being inverse-transferred in correspondence with the respective protrusions on one principal surface of a glass substrate. Forming such a pattern on a glass substrate produced with a die enables alignment of the glass substrate with a mask for photolithography with high accuracy.
申请公布号 US6379777(B1) 申请公布日期 2002.04.30
申请号 US19990367729 申请日期 1999.11.02
申请人 NGK INSULATORS, LTD.;NGK OPTOCERAMICS CO., LTD. 发明人 OTA TAKASHI;FUKUYAMA MASASHI;TOHYAMA KAZUTOSHI
分类号 C03B11/06;C03B11/08;C03B13/14;C03B13/16;C03B23/03;(IPC1-7):B32B3/00;B24B1/00;B29D11/00;C03B13/00 主分类号 C03B11/06
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