发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a DAD for improved latch-up resistance and stable voltage- resistant characteristics. SOLUTION: A first gate electrode 10 and a second drain electrode 13 are linear electrodes whose lengths are shorter than that of a source electrode 9 with an isolating region 20 provided at both ends, and a region surrounded with two isolating regions and the source electrode 9 is a P-channel MOS region PR where a P-channel MOS transistor is formed. The isolating region 20 has a multi-trench structure where a plurality of trenches 21 are provided in a P-type impurity region so arranged as to be almost square in top view. Each trench 21 is filled with a conductor such as a polysilicon, with the conductor so formed as not to be electrically connected to another particular part.
申请公布号 JP2002124681(A) 申请公布日期 2002.04.26
申请号 JP20000317991 申请日期 2000.10.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 AKIYAMA HAJIME
分类号 H01L21/76;H01L21/762;H01L21/8238;H01L27/08;H01L27/088;H01L27/092;H01L29/06;H01L29/40;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 主分类号 H01L21/76
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