METHOD FOR MANUFACTURING PHOTO MASK, PHOTO MASK, REFLECTING PLATE, AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a photo mask permitting manufacture of a favorable liquid crystal display device by suppressing generation of striped irregularity accompanied by seams of scanning and variation in an exposure dose of light for scanning, and to provide a manufacturing method therefor. SOLUTION: Scanning is performed not in sequential order in the scanning direction, but performed in back-and-forth order. Namely, the scanning is performed in such order as after a scan width W1 is scanned, a scan width W3 is scanned with a scan width W2 skipped, and then a scan width W2 is scanned by coming back one section.