摘要 |
PURPOSE: A capacitor of a semiconductor device is provided to simplify a fabricating process by simply stacking a lower electrode, and to effectively increase capacitance by eliminating the need to use additional equipment. CONSTITUTION: An insulation layer is formed on a semiconductor substrate(41). A plug(43) penetrates the insulation layer and is connected to the semiconductor substrate. The lower electrode(50) is formed on the plug and the insulation layer adjacent to the plug. Both side surfaces of the lower electrode have a structure of a roughness type. The lower electrode includes a plurality of metal layers and a plurality of polysilicon layers formed between the metal layers.
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