| 摘要 |
A method and apparatus produce short-wave radiation from a gas-discharge plasma, comprising pre-ionization of the gas in the discharge region between coaxial electrodes achieved through an axial aperture formed in one of the electrodes and initiation of a pinch-type discharge. In order to increase the efficiency, energy, average power and stability of the radiation of the gas-discharge plasma, pre-ionization is achieved by a flux of radiation having wavelengths from the UV to X-ray range and by a flux of accelerated electrons from the plasma of a pulsed sliding discharge initiated in a region not optically communicating with the axis of the pinch-type discharge, with a rate of growth of the discharge voltage across the region of more than 10<11> V/s, the fluxes of radiation and electrons being formed axially symmetrically and directed into the part of the discharge region outside the axis. In a device for implementing the method, the source of pre-ionization is disposed outside the discharge chamber and is designed in the form of an axially symmetrical system for forming a sliding discharge, said system comprising an elongated initiating electrode coated with a dielectric layer on the surface of which electrode a trigger electrode is disposed, the initiating electrode being arranged coaxially with the electrodes of the discharge chamber and formed in such a way that the dielectric layer is disposed in a region not optically communicating with the axis of the discharge chamber and one of the electrodes of the system for forming a sliding discharge being combined with one of the electrodes of the discharge chamber, a pulse generator being introduced into the device that has a rate of growth of output voltage of more than 10<11> V/s, the output of positive polarity of which is connected to the initiating electrode for forming the sliding discharge. A dielectric insert with an axial aperture can be introduced into the discharge chamber, on the surface of said insert there are disposed electrodes of the discharge chamber. |
