| 摘要 |
method for the fabrication of high quality inter-metallic ferromagnetic thin films on a proper substrate, using laser irradiation is presented. The ferromagnetic material is ablated by absorbing irradiation from a pulsed UV laser and forming a thin film on the surface of a substrate that is located near the target and is heated at a temperature lower than 250oC. This method allows the deposition of crystalline thin films of inter-metallic ferromagnetic materials, with improved magnetic properties and reduced coercive field. The advantages of this method over the other conventional methods are the preservation of the stoichiometry of the target, the preservation of the properties of the substrate and the good adhesion, which are obtained even though the substrate is heated at relatively low temperatures. |
