SEAL MEANS AND ITS APPLICATION IN DEPOSITION REACTOR,申请号EP20000951330-传众专利搜索

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发明名称	SEAL MEANS AND ITS APPLICATION IN DEPOSITION REACTOR
摘要
申请公布号	EP1196645(A1)	申请公布日期	2002.04.17
申请号	EP20000951330	申请日期	2000.07.03
申请人	AIXTRON AG	发明人	FRIJLINK, PETER
分类号	C23C16/54;C23C16/44;C30B25/14;H01L21/205;(IPC1-7):C23C16/44	主分类号	C23C16/54
代理机构		代理人
主权项
地址

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