发明名称 |
Micromechanical structure, sensor and method for manufacturing the same |
摘要 |
A micromechanical structure, such as a sensor, includes a substrate, a diaphragm, a cavity, a sacrificial layer and a terminating structure. The terminating structure is cut away in the region of the diaphragm in such a way that a media opening is located above the diaphragm. The diameter of the cavity is smaller over the entire circumference of the cavity than the diameter of the opening. A method for manufacturing the micromechanical structure is also provided.
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申请公布号 |
US6373115(B1) |
申请公布日期 |
2002.04.16 |
申请号 |
US19990384905 |
申请日期 |
1999.08.27 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
KOLB STEFAN;MAIER-SCHNEIDER DIETER;OPPERMANN KLAUS-GUENTER;TIMME HANS-JOERG |
分类号 |
B81B3/00;G01L9/00;G01P15/08;(IPC1-7):H01L29/82;H01L21/00;H01L21/302 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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