发明名称 |
RUTHENIUM COMPOUND FOR CHEMICAL VAPOR DEPOSITION AND METHOD FOR CHEMICAL VAPOR DEPOSITION OF RUTHENIUM THIN FILM OR RUTHENIUM COMPOUND THIN FILM |
摘要 |
PROBLEM TO BE SOLVED: To obtain a ruthenium compound for a chemical vapor deposition, capable of producing a ruthenium thin film or a ruthenium compound thin film having excellent morphology even in the cases of high-temperature deposition and excellent step coverage and producing a thin film having relative low resistivity. SOLUTION: This ruthenium compound is useful for producing a ruthenium thin film or a ruthenium compound thin film by a chemical vapor deposition method and is a ruthenium compound for a chemical vapor deposition comprised of an acylcyclopentadienyl(cyclopentadienyl)ruthenium substituted with a straight-chain or branched-chain hydrocarbon group. The ruthenium compound has excellent morphology even in the case of a decomposition at a relatively high temperature of 250-450 deg.C and can produce a ruthenium thin film having low resistivity.
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申请公布号 |
JP2002114796(A) |
申请公布日期 |
2002.04.16 |
申请号 |
JP20000310504 |
申请日期 |
2000.10.11 |
申请人 |
TANAKA KIKINZOKU KOGYO KK |
发明人 |
OKAMOTO KOJI |
分类号 |
C07F17/02;C07F15/00;C23C16/18;(IPC1-7):C07F17/02 |
主分类号 |
C07F17/02 |
代理机构 |
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地址 |
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