VORRICHTUNG ZUR STEUERUNG EINES DURCHFLUSSES

摘要

A flow control device which can variably control the flow rate with extremely high accuracy over a wide flow rate range from a high to a low flow rate with a single pump. A pump is provided in a main pipe line through which fluid is fed. A bypass branches from the main pipe line at a point nearer to the discharge port than is the pump. A flowmeter and a flow control valve are provided in the bypass. In the bypass is further provided a back pressure regulating valve near the discharge port. The degree of opening of the flow control valve is adjusted based on the flow rate detected by the flowmeter. The back pressure regulating valve suppresses pressure fluctuation on the discharge side of the flow control valve.