| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for improving the flexibility of a manufacturing process and improving production efficiency without reducing the performance of a tandem-type thin-film solar battery. SOLUTION: In the manufacturing method of the tandem-type thin-film solar battery that is an amorphous unit where a plurality of photoelectric units including a p-type layer, an i-type photoelectric conversion layer, and an n-type layer from a light incidence side successively are laminated on a substrate 1, and the furthermost rear unit from at least the light incidence side contains an amorphous i-type photoelectric conversion layer, at least one unit is formed on the substrate 1 by the plasma CVD, and then an i-type boundary layer 6 with a thickness of 5 nm or less is formed by the plasma CVD, then the substrate 1 is taken into the atmosphere, thus exposing the surface of the i-type boundary layer 6 to the atmosphere and then forming a crystalline unit on the i-type boundary layer 6 by the plasma CVD.</p> |
