| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a charged particle beam device in which displacement of the observed image is not caused within the observation field even when moving the sample for a predetermined distance using a moving mechanism of a sample stage and then returning it to the original position during observation of an image of the sample. SOLUTION: By electrically compensating mechanical errors of the moving mechanism of the sample stage with an electrical field moving coil, it is devised that dispersion of reproducibility of the sample position, which may be caused by effect of mechanical play of the moving mechanism of the sample stage and deflection of a sample holder, can be offset.</p> |
