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发明名称	Spule
摘要
申请公布号	DE10026921(C2)	申请公布日期	2002.04.11
申请号	DE2000126921	申请日期	2000.05.30
申请人	ALD VACUUM TECHNOLOGIES AG	发明人	DINTER, HANS-PETER;GOY, WILFRIED
分类号	F27B14/06;F27D99/00;H01F5/00;H01F27/28;H01F37/00;H05B6/36;(IPC1-7):H01F27/30	主分类号	F27B14/06
代理机构		代理人
主权项
地址

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