SILICON-CONTAINING VINYL COPOLYMER AND RESIST COMPOSITION CONTAINING THE SAME

摘要

The present invention relates to a silicon-containing vinyl copolymer which includes a maleic anhydride repeating unit, a norbornene repeating unit with an acid-labile group, and a vinyl repeating unit with a silicon-containing group. The silicon-containing vinyl copolymer is suitable for use as a top layer resist in a bilayer resist system.