| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration sensor which can be constituted into a small-sized, surface-mounted type and can detect even DC and low-frequency acceleration and remove the influence of factors, such as temperature variations which are other than acceleration. SOLUTION: A bimorph type acceleration detecting element 2 is constituted by jointing 1st and 2nd resonators 3 and 3, consisting of piezoelectric bodies each having electrodes formed on both main surfaces, together across an intermediate layer 5 and has one or both of lengthwise end parts fixed and supported, so that the 1st and 2nd resonators 3 and 4 flex in one body accompanying acceleration G is applied. The intermediate layer 5 has hardness sufficient for to transmitting the bending stress of one resonator to the other resonator, and the vibration of one resonator is attenuated and transmitted to the resonator. Frequency variations or impedance variations of the 1st and 2nd resonators 3 and 4, caused by the flection of the acceleration detecting element 2, are detected differentially so as to detect the acceleration.</p> |
