| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump whose mechanism is compact with high efficiency by simplified manufacturing and method. SOLUTION: A diaphragm 20 is laid on the top of a thin plate like cabinet 10 provided with two through-holes 11 and 12, and a pump chamber 25 is formed by the diaphragm 20 whose periphery is bonded to the cabinet 10 using bond 21. In the through-hole 11, a sheet of rectangular film 30 is so laid as to cover the opening 13 on the top of the plate cabinet 10 and a suction valve is formed by bonding with the plate like cabinet 10 by laser radiation at the location parallel with a short side of a sheet of rectangular film 30 by covering the opening 13. Also, in the through-hole 12, a rectangular film 30 is so laid as to cover the opening 14 at the bottom of the plate like cabinet 10, and a suction valve is formed by bonding with the plate like cabinet 10 at the location parallel with a short side of a sheet of rectangular film 30 by covering the opening 14, and a diaphragm pump A related to this invention is manufactured. |
