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发明名称
Positive resist composition comprising a dipyridyl compound
摘要
申请公布号
EP0837367(B1)
申请公布日期
2002.04.10
申请号
EP19970117863
申请日期
1997.10.15
申请人
SUMITOMO CHEMICAL COMPANY LIMITED
发明人
FUKUI, NOBUHITO;YAKO, YUKO;TAKAGAKI, HIROSHI;TAKAHASHI, KENJI
分类号
G03F7/004;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
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