| 摘要 |
PROBLEM TO BE SOLVED: To provide position detection type load sensor having compact and simple structure and allowing easy temperature characteristic compensation so as to detect very small displacement corresponding to a load with high resolution. SOLUTION: A magneto-responsive member 11 is magnetically connected with no contact to a single sensor coil L1 excited by an alternating current. A relative position between the magneto-responsive member 11 and the sensor coil L1 is varied according to a load to be detected, and according to a change in the relative position, an impedance of the sensor coil is changed. A temperature compensation coil L2 is connected in series to the sensor coil L1, and when an output voltage varied according to the impedance change of the sensor coil is taken out for the sensor coil from the connection point between them, an output processed for temperature drift compensation is obtained. When the output voltage for the sensor coil and a reference voltage are computed, at least two alternating current output signals having a predetermined periodic amplitude function as an amplitude coefficient are generated. On the basis of these signals, very small displacement corresponding to the load is detected as a phase change, and detection is carried out with high precision.
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