发明名称 Excimer laser ablation process control of multilaminate materials
摘要 A method of ablating holes in a material, using a laminated material which includes first and second layers. The first and second layers have different coefficients of thermal expansion. The first layer has a hole within it surrounding a target region of the second layer in the laminated material. Thus, the target region is not laminated to the second layer but is surrounded entirely by laminated regions wherein the first layer is laminated to the second layer. A laser source producing energy of a wavelength and a power level that can ablate material from the first layer is directed toward the target region after and/or during changing the temperature of the laminated material so as to place the target region under tension, thereafter ablation of the target region produces the desired holes.
申请公布号 US6369354(B1) 申请公布日期 2002.04.09
申请号 US20000616582 申请日期 2000.07.14
申请人 ARADIGM CORPORATION 发明人 BESTE RUSSELL D.
分类号 B23K26/00;B23K26/38;B32B7/02;H05K3/00;(IPC1-7):B23K26/38;B23K26/40 主分类号 B23K26/00
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