METHOD AND DEVICE FOR PRODUCING IONS

摘要

PROBLEM TO BE SOLVED: To provide a device for taking out clean ions. SOLUTION: An ion outlet portion 20 of this device has, across an ion passage 21 in the order from the side of an ion generation chamber 10, a first electrode 22 which has the same polarity as the polarity of the ions generated in the chamber, a second electrode 23 which has the opposite polarity to the polarity of the ions, and a third electrode 24 which has a medium electric potential between the potential of the electrode 22 and the potential of the electrode 23. The first to the third electrode have coaxial openings that form the ion passage 21.